Issued Patents 2021
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11170979 | Plasma etching method and plasma etching apparatus | Koichi Nagami, Kazunobu Fujiwara, Tatsuro Ohshita, Takashi Dokan, Koji Maruyama +1 more | 2021-11-09 |
| 11152194 | Plasma processing apparatuses having a dielectric injector | Zhiying Chen, Joel Blakeney, Peter Ventzek, Alok Ranjan | 2021-10-19 |
| 11107663 | Plasma processing system and plasma processing method | Kazuki Moyama | 2021-08-31 |
| 11043389 | Substrate processing method | Kazuki Moyama | 2021-06-22 |
| 10886135 | Substrate processing method and substrate processing apparatus | Shinji Kubota, Akihiro Yokota, Gen TAMAMUSHI | 2021-01-05 |