Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11170979 | Plasma etching method and plasma etching apparatus | Koichi Nagami, Tatsuro Ohshita, Takashi Dokan, Koji Maruyama, Kazuya Nagaseki +1 more | 2021-11-09 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11170979 | Plasma etching method and plasma etching apparatus | Koichi Nagami, Tatsuro Ohshita, Takashi Dokan, Koji Maruyama, Kazuya Nagaseki +1 more | 2021-11-09 |