Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11170979 | Plasma etching method and plasma etching apparatus | Koichi Nagami, Kazunobu Fujiwara, Tatsuro Ohshita, Koji Maruyama, Kazuya Nagaseki +1 more | 2021-11-09 |
| 11087960 | Radio frequency power source and plasma processing apparatus | Shinji Kubota | 2021-08-10 |
| 11017985 | Plasma processing apparatus, impedance matching method, and plasma processing method | Chishio Koshimizu, Shinji Kubota | 2021-05-25 |