Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11170979 | Plasma etching method and plasma etching apparatus | Koichi Nagami, Kazunobu Fujiwara, Tatsuro Ohshita, Takashi Dokan, Kazuya Nagaseki +1 more | 2021-11-09 |
| 11041241 | Plasma processing apparatus and temperature control method | Akihiro Yokota, Kazuki Moyama | 2021-06-22 |