Issued Patents 2021
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11145490 | Plasma processing method | Takanori BANSE, Joji TAKAYOSHI, Shinya Morikita, Naohiko Okunishi | 2021-10-12 |
| 11133157 | Plasma processing apparatus | Shinji Himori, Tatsuro Ohshita, Shu Kusano | 2021-09-28 |
| 11041241 | Plasma processing apparatus and temperature control method | Kazuki Moyama, Koji Maruyama | 2021-06-22 |
| 10886135 | Substrate processing method and substrate processing apparatus | Shinji Kubota, Kazuya Nagaseki, Gen TAMAMUSHI | 2021-01-05 |