Issued Patents 2021
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11145490 | Plasma processing method | Akihiro Yokota, Takanori BANSE, Joji TAKAYOSHI, Naohiko Okunishi | 2021-10-12 |
| 11081351 | Method of processing substrate, device manufacturing method, and plasma processing apparatus | Yusuke Aoki, Toshikatsu TOBANA, Satoru Nakamura | 2021-08-03 |
| 11062882 | Plasma processing apparatus and plasma processing method | Yusuke Aoki, Toshikatsu TOBANA, Fumiya TAKATA | 2021-07-13 |
| 10991551 | Cleaning method and plasma processing apparatus | Mohd Fairuz BIN BUDIMAN, Toshifumi Nagaiwa | 2021-04-27 |
| 10957515 | Plasma processing method and plasma processing apparatus | Masanori Hosoya, Soichiro Kimura | 2021-03-23 |
| 10950458 | Etching method | Yasutaka HAMA, Kiyohito Ito | 2021-03-16 |
| 10886138 | Substrate processing method and substrate processing apparatus | Timothy Tianshyun Yang, Kiyohito Ito, Michiko Nakaya, Masanobu Honda | 2021-01-05 |