Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11201063 | Substrate processing method and substrate processing apparatus | Motoki Noro, Shu Kino | 2021-12-14 |
| 10998223 | Method for processing target object | Seiji Yokoyama | 2021-05-04 |
| 10950458 | Etching method | Shinya Morikita, Kiyohito Ito | 2021-03-16 |