Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10950458 | Etching method | Yasutaka HAMA, Shinya Morikita | 2021-03-16 |
| 10886138 | Substrate processing method and substrate processing apparatus | Timothy Tianshyun Yang, Shinya Morikita, Michiko Nakaya, Masanobu Honda | 2021-01-05 |