Issued Patents 2021
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11127598 | Film etching method for etching film | Takayuki Hoshi, Masahiro Tabata, Toru Hisamatsu | 2021-09-21 |
| 11114304 | Substrate processing method | Takayuki Katsunuma, Toru Hisamatsu, Shinya Ishikawa, Yoshihide Kihara, Maju TOMURA +1 more | 2021-09-07 |
| 11101138 | Etching method | Maju TOMURA, Yoshihide Kihara | 2021-08-24 |
| 11081360 | Method for processing workpiece | Masahiro Tabata, Toru Hisamatsu, Yoshihide Kihara | 2021-08-03 |
| 10886097 | Plasma processing apparatus and plasma processing method | Kazuhiro Kubota | 2021-01-05 |
| 10886138 | Substrate processing method and substrate processing apparatus | Timothy Tianshyun Yang, Shinya Morikita, Kiyohito Ito, Michiko Nakaya | 2021-01-05 |
| 10886136 | Method for processing substrates | Toru Hisamatsu, Yoshihide Kihara | 2021-01-05 |