Issued Patents 2021
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11145518 | Method and apparatus for etching target object | Sho Kumakura | 2021-10-12 |
| 11139175 | Method of processing target object | Yoshihide Kihara, Toru Hisamatsu | 2021-10-05 |
| 11133192 | Workpiece processing method | Toru Hisamatsu, Yoshihide Kihara | 2021-09-28 |
| 11127598 | Film etching method for etching film | Takayuki Hoshi, Masanobu Honda, Toru Hisamatsu | 2021-09-21 |
| 11081360 | Method for processing workpiece | Toru Hisamatsu, Yoshihide Kihara, Masanobu Honda | 2021-08-03 |
| 10923332 | Plasma processing method | Ryuichi Asako, Takao FUNAKUBO | 2021-02-16 |
| 10916420 | Processing method and plasma processing apparatus | Toru Hisamatsu, Maju TOMURA, Sho Kumakura, Hironari Sasagawa | 2021-02-09 |
| 10903085 | Method for etching organic region | Ryuichi Asako, Takao FUNAKUBO | 2021-01-26 |