Issued Patents 2021
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11171012 | Method and apparatus for formation of protective sidewall layer for bow reduction | Ryutaro SUDA, Kae KUMAGAI | 2021-11-09 |
| 11139169 | Etching method and etching apparatus | Sho Kumakura, Satoshi OHUCHIDA | 2021-10-05 |
| 11127600 | Etching method | Koki Tanaka | 2021-09-21 |
| 11114304 | Substrate processing method | Takayuki Katsunuma, Toru Hisamatsu, Shinya Ishikawa, Yoshihide Kihara, Masanobu Honda +1 more | 2021-09-07 |
| 11101138 | Etching method | Yoshihide Kihara, Masanobu Honda | 2021-08-24 |
| 10916420 | Processing method and plasma processing apparatus | Masahiro Tabata, Toru Hisamatsu, Sho Kumakura, Hironari Sasagawa | 2021-02-09 |