Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11114304 | Substrate processing method | Toru Hisamatsu, Shinya Ishikawa, Yoshihide Kihara, Masanobu Honda, Maju TOMURA +1 more | 2021-09-07 |
| 10923360 | Method of etching film and plasma processing apparatus | — | 2021-02-16 |
| 10916442 | Etching method | — | 2021-02-09 |