Issued Patents 2021
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11139175 | Method of processing target object | Toru Hisamatsu, Masahiro Tabata | 2021-10-05 |
| 11133192 | Workpiece processing method | Masahiro Tabata, Toru Hisamatsu | 2021-09-28 |
| 11114304 | Substrate processing method | Takayuki Katsunuma, Toru Hisamatsu, Shinya Ishikawa, Masanobu Honda, Maju TOMURA +1 more | 2021-09-07 |
| 11101138 | Etching method | Maju TOMURA, Masanobu Honda | 2021-08-24 |
| 11094551 | Plasma processing method and plasma processing apparatus | Toru Hisamatsu, Kensuke Taniguchi, Yoshinari Hatazaki | 2021-08-17 |
| 11081360 | Method for processing workpiece | Masahiro Tabata, Toru Hisamatsu, Masanobu Honda | 2021-08-03 |
| 11056370 | Method for processing workpiece | Shuhei Ogawa, Keigo Toyoda | 2021-07-06 |
| 10886136 | Method for processing substrates | Toru Hisamatsu, Masanobu Honda | 2021-01-05 |