Issued Patents 2021
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11201062 | Method and apparatus for processing a substrate | Yuki Iijima, Kae KUMAGAI | 2021-12-14 |
| 11139175 | Method of processing target object | Yoshihide Kihara, Masahiro Tabata | 2021-10-05 |
| 11133192 | Workpiece processing method | Masahiro Tabata, Yoshihide Kihara | 2021-09-28 |
| 11127598 | Film etching method for etching film | Takayuki Hoshi, Masanobu Honda, Masahiro Tabata | 2021-09-21 |
| 11114304 | Substrate processing method | Takayuki Katsunuma, Shinya Ishikawa, Yoshihide Kihara, Masanobu Honda, Maju TOMURA +1 more | 2021-09-07 |
| 11094551 | Plasma processing method and plasma processing apparatus | Yoshihide Kihara, Kensuke Taniguchi, Yoshinari Hatazaki | 2021-08-17 |
| 11081360 | Method for processing workpiece | Masahiro Tabata, Yoshihide Kihara, Masanobu Honda | 2021-08-03 |
| 10916420 | Processing method and plasma processing apparatus | Masahiro Tabata, Maju TOMURA, Sho Kumakura, Hironari Sasagawa | 2021-02-09 |
| 10886136 | Method for processing substrates | Masanobu Honda, Yoshihide Kihara | 2021-01-05 |