Issued Patents 2021
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11145518 | Method and apparatus for etching target object | Masahiro Tabata | 2021-10-12 |
| 11139169 | Etching method and etching apparatus | Satoshi OHUCHIDA, Maju TOMURA | 2021-10-05 |
| 11114304 | Substrate processing method | Takayuki Katsunuma, Toru Hisamatsu, Shinya Ishikawa, Yoshihide Kihara, Masanobu Honda +1 more | 2021-09-07 |
| 11094550 | Etching method and etching apparatus | Ryutaro SUDA | 2021-08-17 |
| 10916420 | Processing method and plasma processing apparatus | Masahiro Tabata, Toru Hisamatsu, Maju TOMURA, Hironari Sasagawa | 2021-02-09 |