Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11171012 | Method and apparatus for formation of protective sidewall layer for bow reduction | Kae KUMAGAI, Maju TOMURA | 2021-11-09 |
| 11094550 | Etching method and etching apparatus | Sho Kumakura | 2021-08-17 |