Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11201062 | Method and apparatus for processing a substrate | Yuki Iijima, Toru Hisamatsu | 2021-12-14 |
| 11171012 | Method and apparatus for formation of protective sidewall layer for bow reduction | Ryutaro SUDA, Maju TOMURA | 2021-11-09 |