Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10916420 | Processing method and plasma processing apparatus | Masahiro Tabata, Toru Hisamatsu, Maju TOMURA, Sho Kumakura | 2021-02-09 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10916420 | Processing method and plasma processing apparatus | Masahiro Tabata, Toru Hisamatsu, Maju TOMURA, Sho Kumakura | 2021-02-09 |