TF

Takao FUNAKUBO

TL Tokyo Electron Limited: 2 patents #116 of 787Top 15%
📍 Rifu, JP: #60 of 314 inventorsTop 20%
Overall (2021): #107,900 of 548,734Top 20%
2
Patents 2021

Issued Patents 2021

Showing 1–2 of 2 patents

Patent #TitleCo-InventorsDate
10923332 Plasma processing method Ryuichi Asako, Masahiro Tabata 2021-02-16
10903085 Method for etching organic region Ryuichi Asako, Masahiro Tabata 2021-01-26