Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10923332 | Plasma processing method | Masahiro Tabata, Takao FUNAKUBO | 2021-02-16 |
| 10903085 | Method for etching organic region | Masahiro Tabata, Takao FUNAKUBO | 2021-01-26 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10923332 | Plasma processing method | Masahiro Tabata, Takao FUNAKUBO | 2021-02-16 |
| 10903085 | Method for etching organic region | Masahiro Tabata, Takao FUNAKUBO | 2021-01-26 |