Issued Patents 2021
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11145490 | Plasma processing method | Akihiro Yokota, Takanori BANSE, Joji TAKAYOSHI, Shinya Morikita | 2021-10-12 |
| 11037762 | Plasma processing apparatus | Yohei Yamazawa, Hironobu Misawa, Hidehito Soeta | 2021-06-15 |
| 10897808 | Filter device and plasma processing apparatus | Nozomu Nagashima | 2021-01-19 |
| 10886109 | Stage and plasma processing apparatus | Hiroki Endo, Katsuyuki Koizumi | 2021-01-05 |