Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11011347 | Plasma processing apparatus | Daisuke Hayashi, Kengo Kaneko | 2021-05-18 |
| 10923369 | Temperature controlling apparatus, temperature controlling method, and placing table | Kengo Kaneko | 2021-02-16 |
| 10886109 | Stage and plasma processing apparatus | Hiroki Endo, Naohiko Okunishi | 2021-01-05 |