Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11171007 | Plasma processing apparatus and plasma etching method | — | 2021-11-09 |
| 10991551 | Cleaning method and plasma processing apparatus | Mohd Fairuz BIN BUDIMAN, Shinya Morikita | 2021-04-27 |