Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11081351 | Method of processing substrate, device manufacturing method, and plasma processing apparatus | Yusuke Aoki, Shinya Morikita, Satoru Nakamura | 2021-08-03 |
| 11062882 | Plasma processing apparatus and plasma processing method | Yusuke Aoki, Shinya Morikita, Fumiya TAKATA | 2021-07-13 |