Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11085618 | Vehicle lamp having a heatsink | — | 2021-08-10 |
| 11081351 | Method of processing substrate, device manufacturing method, and plasma processing apparatus | Toshikatsu TOBANA, Shinya Morikita, Satoru Nakamura | 2021-08-03 |
| 11062882 | Plasma processing apparatus and plasma processing method | Shinya Morikita, Toshikatsu TOBANA, Fumiya TAKATA | 2021-07-13 |