Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10957515 | Plasma processing method and plasma processing apparatus | Soichiro Kimura, Shinya Morikita | 2021-03-23 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10957515 | Plasma processing method and plasma processing apparatus | Soichiro Kimura, Shinya Morikita | 2021-03-23 |