Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11170979 | Plasma etching method and plasma etching apparatus | Koichi Nagami, Kazunobu Fujiwara, Tatsuro Ohshita, Takashi Dokan, Koji Maruyama +1 more | 2021-11-09 |
| 11133157 | Plasma processing apparatus | Akihiro Yokota, Tatsuro Ohshita, Shu Kusano | 2021-09-28 |
| 10943766 | Power feed member and substrate processing apparatus | Shunichi Ito, Etsuji Ito, Naokazu Furuya, Gen TAMAMUSHI | 2021-03-09 |