Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10943766 | Power feed member and substrate processing apparatus | Shunichi Ito, Shinji Himori, Naokazu Furuya, Gen TAMAMUSHI | 2021-03-09 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10943766 | Power feed member and substrate processing apparatus | Shunichi Ito, Shinji Himori, Naokazu Furuya, Gen TAMAMUSHI | 2021-03-09 |