Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10943766 | Power feed member and substrate processing apparatus | Shunichi Ito, Shinji Himori, Etsuji Ito, Naokazu Furuya | 2021-03-09 |
| 10886135 | Substrate processing method and substrate processing apparatus | Shinji Kubota, Kazuya Nagaseki, Akihiro Yokota | 2021-01-05 |