Issued Patents 2021
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11205561 | Plasma processing apparatus | — | 2021-12-21 |
| 11087960 | Radio frequency power source and plasma processing apparatus | Takashi Dokan | 2021-08-10 |
| 11017985 | Plasma processing apparatus, impedance matching method, and plasma processing method | Chishio Koshimizu, Takashi Dokan | 2021-05-25 |
| 11019314 | Projector and method for controlling projector | — | 2021-05-25 |
| 10978274 | Plasma processing apparatus and method for generating plasma | — | 2021-04-13 |
| 10971336 | Plasma processing apparatus and plasma processing method | — | 2021-04-06 |
| 10886135 | Substrate processing method and substrate processing apparatus | Kazuya Nagaseki, Akihiro Yokota, Gen TAMAMUSHI | 2021-01-05 |