Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11201034 | Plasma processing apparatus and control method | Ryuji Hisatomi, Michishige Saito | 2021-12-14 |
| 11017985 | Plasma processing apparatus, impedance matching method, and plasma processing method | Takashi Dokan, Shinji Kubota | 2021-05-25 |
| 10937631 | Plasma processing apparatus and plasma processing method | Jun Yamawaku, Tatsuo Matsudo | 2021-03-02 |