TM

Tatsuo Matsudo

TL Tokyo Electron Limited: 1 patents #275 of 787Top 35%
Overall (2021): #241,383 of 548,734Top 45%
1
Patents 2021

Issued Patents 2021

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
10937631 Plasma processing apparatus and plasma processing method Jun Yamawaku, Chishio Koshimizu 2021-03-02