Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11183374 | Wastage determination method and plasma processing apparatus | Yusuke Hirayama | 2021-11-23 |
| 11133157 | Plasma processing apparatus | Akihiro Yokota, Shinji Himori, Tatsuro Ohshita | 2021-09-28 |