Issued Patents 2021
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11107663 | Plasma processing system and plasma processing method | Kazuya Nagaseki | 2021-08-31 |
| 11094507 | Power generation systems and methods for plasma stability and control | Merritt Funk, Chelsea DuBose, Justin Moses, Kazushi Kaneko | 2021-08-17 |
| 11050394 | Modules, multi-stage systems, and related methods for radio frequency power amplifiers | Chelsea DuBose, Merritt Funk, Justin Moses, Kazushi Kaneko | 2021-06-29 |
| 11041241 | Plasma processing apparatus and temperature control method | Akihiro Yokota, Koji Maruyama | 2021-06-22 |
| 11043389 | Substrate processing method | Kazuya Nagaseki | 2021-06-22 |
| 10896842 | Manufacturing method of sample table | Wataru Yoshikawa, Nobuyuki Okayama, Kenji Sudou, Yasuhiro Otsuka | 2021-01-19 |