Issued Patents 2021
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11205562 | Hybrid electron beam and RF plasma system for controlled content of radicals and ions | Peter Ventzek, Alok Ranjan | 2021-12-21 |
| 11183398 | Ruthenium hard mask process | Alok Ranjan, Peter L. G. Ventzek | 2021-11-23 |
| 11152194 | Plasma processing apparatuses having a dielectric injector | Joel Blakeney, Peter Ventzek, Alok Ranjan, Kazuya Nagaseki | 2021-10-19 |
| 11043362 | Plasma processing apparatuses including multiple electron sources | Peter Ventzek, Barton Lane, Alok Ranjan | 2021-06-22 |
| 10998169 | Systems and methods of control for plasma processing | Peter Ventzek, Alok Ranjan | 2021-05-04 |