Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10998170 | Method for ion mass separation and ion energy control in process plasmas | Yusuke Yoshida, Sergey Voronin, Alok Ranjan, David J. Coumou | 2021-05-04 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10998170 | Method for ion mass separation and ion energy control in process plasmas | Yusuke Yoshida, Sergey Voronin, Alok Ranjan, David J. Coumou | 2021-05-04 |