Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11158516 | Plasma processing methods using low frequency bias pulses | Alok Ranjan, Peter Ventzek | 2021-10-26 |
| 10910196 | Mode-switching plasma systems and methods of operating thereof | Peter Ventzek, Alok Ranjan, Michael Hummel | 2021-02-02 |