Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10991594 | Method for area-selective etching of silicon nitride layers for the manufacture of microelectronic workpieces | Alok Ranjan | 2021-04-27 |
| 10937662 | Method of isotropic etching of silicon oxide utilizing fluorocarbon chemistry | Alok Ranjan | 2021-03-02 |