Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11037798 | Self-limiting cyclic etch method for carbon-based films | Barton Lane, Alok Ranjan, Peter Ventzek | 2021-06-15 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11037798 | Self-limiting cyclic etch method for carbon-based films | Barton Lane, Alok Ranjan, Peter Ventzek | 2021-06-15 |