Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11211269 | Multi-object capable loadlock system | Andrew Paul Harbert, Michael C Kuchar, Nicholas Michael Bergantz, Sivakumar Ramalingam, Karuppasamy Muthukamatchi +1 more | 2021-12-28 |
| 10964584 | Process kit ring adaptor | Andreas Schmid, Denis M. Koosau, Nicholas Michael Kopec, Steven E. Babayan, Douglas R. McAllister +3 more | 2021-03-30 |