Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11211269 | Multi-object capable loadlock system | Andrew Paul Harbert, Michael C Kuchar, Leon Volfovski, Sivakumar Ramalingam, Karuppasamy Muthukamatchi +1 more | 2021-12-28 |
| 11139190 | Equipment front end modules including multiple aligners, assemblies, and methods | — | 2021-10-05 |