Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 11114286 | In-situ optical chamber surface and process sensor | Chuang-Chia Lin, Upendra Ummethala, Steven E. Babayan | 2021-09-07 | $49,370,000 |
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Skip to contentShowing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 11114286 | In-situ optical chamber surface and process sensor | Chuang-Chia Lin, Upendra Ummethala, Steven E. Babayan | 2021-09-07 | $49,370,000 |