Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11114286 | In-situ optical chamber surface and process sensor | Chuang-Chia Lin, Upendra Ummethala, Steven E. Babayan | 2021-09-07 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11114286 | In-situ optical chamber surface and process sensor | Chuang-Chia Lin, Upendra Ummethala, Steven E. Babayan | 2021-09-07 |