Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11171023 | Diode laser for wafer heating for EPI processes | Schubert S. Chu, Douglas E. Holmgren, Kartik Shah, Palamurali GAJENDRA, Nyi O. Myo +5 more | 2021-11-09 |
| 11145761 | Horizontal gate all around and FinFET device isolation | Shiyu Sun, Naomi Yoshida, Theresa Kramer Guarini, Sung Won Jun, Vanessa Pena +4 more | 2021-10-12 |
| 11081358 | Silicide film nucleation | Xuebin Li, Patricia M. Liu | 2021-08-03 |
| 11037838 | In-situ integrated chambers | Xuebin Li, Schubert S. Chu, Patricia M. Liu, Gaurav Thareja, Raymond Hung | 2021-06-15 |
| 11031241 | Method of growing doped group IV materials | Yi-Chiau Huang | 2021-06-08 |
| 11021795 | Multi zone spot heating in epi | Shu-Kwan LAU, Koji Nakanishi, Toshiyuki Nakagawa, Zuoming ZHU, Zhiyuan Ye +3 more | 2021-06-01 |