Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11114320 | Processing system and method of forming a contact | Gaurav Thareja, Takashi Kuratomi, Xianmin Tang, Sanjay Natarajan, Keyvan Kashefizadeh +3 more | 2021-09-07 |
| 10985023 | Methods for depositing fluorine/carbon-free conformal tungsten | Xinyu Fu, Srinivas Gandikota, Atif Noori, Mei Chang, David Thompson +1 more | 2021-04-20 |