Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11133155 | Apparatus for depositing metal films with plasma treatment | Daping Yao, Hyman Lam, John C. Forster, Jiang Lu, Can Xu +2 more | 2021-09-28 |
| 11033930 | Methods and apparatus for cryogenic gas stream assisted SAM-based selective deposition | Chang Ke, Song-Moon Suh, Liqi Wu, Michael S. Jackson, Lei Zhou +3 more | 2021-06-15 |
| 11018009 | Tuning work function of p-metal work function films through vapor deposition | Guoqiang Jian, Wei V. Tang, Chi-Chou Lin, Paul F. Ma, Yixiong Yang +1 more | 2021-05-25 |
| 10985023 | Methods for depositing fluorine/carbon-free conformal tungsten | Xinyu Fu, Srinivas Gandikota, Avgerinos V. Gelatos, Atif Noori, David Thompson +1 more | 2021-04-20 |