Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10985023 | Methods for depositing fluorine/carbon-free conformal tungsten | Srinivas Gandikota, Avgerinos V. Gelatos, Atif Noori, Mei Chang, David Thompson +1 more | 2021-04-20 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10985023 | Methods for depositing fluorine/carbon-free conformal tungsten | Srinivas Gandikota, Avgerinos V. Gelatos, Atif Noori, Mei Chang, David Thompson +1 more | 2021-04-20 |