Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11171045 | Deposition of metal films with tungsten liner | Yu Lei, Sang-Hyeob Lee, Chris Pabelico, Tae Hong Ha, Xianmin Tang +1 more | 2021-11-09 |
| 11164780 | Process integration approach for selective metal via fill | Shi YOU, He Ren, Mehul Naik, Feng Chen | 2021-11-02 |