Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11171045 | Deposition of metal films with tungsten liner | Sang-Hyeob Lee, Chris Pabelico, Yi Xu, Tae Hong Ha, Xianmin Tang +1 more | 2021-11-09 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11171045 | Deposition of metal films with tungsten liner | Sang-Hyeob Lee, Chris Pabelico, Yi Xu, Tae Hong Ha, Xianmin Tang +1 more | 2021-11-09 |