Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11177128 | Apparatus and methods for manufacturing semiconductor structures using protective barrier layer | Pramit Manna, Abhijit Basu Mallick, Kurtis Leschkies, Steven Verhaverbeke | 2021-11-16 |
| 11011384 | Gapfill using reactive anneal | Abhijit Basu Mallick, Pramit Manna | 2021-05-18 |
| 10886140 | 3D NAND etch | Pramit Manna, Bo Qi, Abhijit Basu Mallick, Rui Cheng, Tomohiko Kitajima +2 more | 2021-01-05 |