Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11136665 | Shadow ring for modifying wafer edge and bevel deposition | Dale Du Bois, Mohamad A. Ayoub, Robert W. Kim, Amit Kumar BANSAL, Binh Nguyen +6 more | 2021-10-05 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11136665 | Shadow ring for modifying wafer edge and bevel deposition | Dale Du Bois, Mohamad A. Ayoub, Robert W. Kim, Amit Kumar BANSAL, Binh Nguyen +6 more | 2021-10-05 |